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CNC Machining Services
PortfoliosPrecision CNC Machining of an Aluminum Gear DrivePrecision Custom CNC Machining of an Aluminum Slit Production HousingCustom Design & Engineering of a 3 Axis Ultra High Precision Drive Stage with Linear EncoderElectro Mechanical Assembly of a 6 Axis High Vacuum Precision Drive StageManufacture of Automated, High Vacuum Rapid Exchange Sample Loader
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Manufacture of Automated, High Vacuum Rapid Exchange Sample Loader For The Semiconductor Industry

High Vacuum Rapid Exchange Sample Loader
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High Vacuum Rapid Exchange Sample Loader
 

At Alpine Precision, we manufactured this sophisticated, technologically-advanced stage from an OEM's rigorous specifications. This 6 axis drive stage is manufactured in serial production for use in a world leading OEM’s premier SEM/FIB tool. We manufacture this component with the required range of motion, resolution and velocity across the various axes (X, Y, Z, tile, rotate, Z prime). The manufacture of this stage required the incorporation and working knowledge of optical sensors and mechanical switches; high vacuum compatible components, wires, and lubrication; high vacuum material preparation and testing; high precision linear rails, bearings and ball screw assemblies; high performance stepper motors and drives; as well as a number of other best practice considerations associated with performing under high vacuum and high precision positioning. All machined components were CNC machined at Alpine Precision.

Custom control plans were developed to ensure compliance with our customer’s specifications as well as domestic and international standards.  Manufacturing process plans were designed to ensure consistency between builds and copy exact compliance.  Critical attention was paid to ensure cosmetically pleasing appearance of finished unit.

For more information on the manufacturing services provided on this project for the semiconductor industry, see the table below or contact us directly.

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Highlights of this High Vacuum Rapid Exchange Sample Loader Project for the Semiconductor Industry

Product Description 6 Axis High Vacuum Precision Drive Stage
Electro Mechanical Assembly Capabilities Applied/Processes Primary:
Precision Electro Mechanical Assembly

Secondary:
Electronics Integration
High Vacuum Component Preparation
CNC Machining
Cosmetic surfacing
Material Used Aluminum /Stainless Steel/PTFE/Rulon
Precision Drive components
Stepper Motors and drives
Vacuum compatible lubricants
Vacuum compatible wire
Optical sensors
Material Finish Nickel Plating
Painting
Passivation
Vacuum compatible cleaning
Features
  • 6 motorized axis of motion
  • Repeatability to better than 1 micron
  • High Vacuum compatible
In process testing/inspection performed Custom developed control plans
Industry for Use SEM/FIB, Semiconductor Application
Volume Serial Production
Delivery Location Germany
Standards Met Customers Specifications, Vacuum Specifications, Performance Specifications, RoHS Compliance, CE.
Product Name 6 Axis Motorized Drive Stage
Movement/Performance X Axis
Range of Motion: 101.4 mm
Resolution: 2.5 nm/step
Velocity: 8 mm/sec
Y Axis
Range of Motion: 101.4 mm
Resolution: 2.5 nm/step
Velocity: 8 mm/sec
Z Axis (Prime)
Range of Motion: 10 mm
Resolution: 0.0267 nm/step
Velocity: 0.1 mm/sec
Z Axis
Range of Motion: 55 mm
Resolution: 0.4 nm/step
Velocity: 1.28 mm/sec
Tilt Axis
Range of Motion: -10° to +63°
Resolution: 0.6 micro°/step
Velocity: 2.0 °/sec
Rotate Axis
Range of Motion: Continuous
Resolution: 3.25 micro°/step
Velocity: 12 °/sec
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